TCM5500 series Micro Flow Gas Flow Sensor MFM

I. Product Features

The TC5500 series gas mass flow sensor uses a microelectromechanical system (MEMS) flow sensing chip, which is suitable for measuring clean, relatively dry small flow gases and process control for various purposes. It has the characteristics of high sensitivity, high reliability, high stability, and low cost.

• High precision (5.0% F.S accuracy)
• Linear output and no temperature compensation required
• Maintain long-term stability with minimal zero drift
• Fast response time (5ms response time)
• Wide flow range -3~3SLM
• Compact size

II. Application Fields

• high-speed chip mounter
• die bonder
• SMT
• Adsorption confirmation
• Portable oxygen concentrator

III. Product Performance Indicators

1.Operating Condition:

• Working temperature: -25 ° C to 85 ° C
• Storage temperature: -40 ° C to 90C
• The sensor has an impact resistance of up to 100g
• Humidity: 0~100% RH (without condensation)

2.Performance：