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TCM5218 series Micro Flow Gas Flow Sensor MFM

Product Features:
1.High precision (2.5% F.S accuracy)
2.Linear output and no temperature compensation required
3.Maintain long-term stability with minimal zero drift
4.Anti clogging and pressure shock
5.Analog digital output is optional
6.Fast response time (10ms)
7.Wide flow range 300-1000S LM

Product Description:

I. Product Features

The TC5218 series gas mass flow sensor has expanded its range based on the TC5200 and can support a maximum of 1000L/min. Inheriting the superior performance of 5200, it has small size, wide range of measurement, and stable measurement. The metal body makes installation more convenient and secure.


TCM5218 is based on independently developed MEMS flow sensing units and high-precision digital processing circuits. The integrated Δ - ∑ A/D converter and logic circuit with internal calibration function jointly ensure real-time and effective acquisition of sensing signals, obtaining accurate flow signals. Corresponding compensation algorithms are processed internally, so there is no need to perform any external calibration compensation to ensure high-precision flow output. A friendly digital output communication method allows users to easily obtain corresponding data information through communication;



  • High precision (2.5% F.S accuracy)
  • Linear output and no temperature compensation required
  • Maintain long-term stability with minimal zero drift
  • Anti clogging and pressure shock
  • Analog digital output is optional
  • Fast response time (10ms)
  • Wide flow range 300-1000S LM


II. Application Fields

  • photovoltaic equipment
  • vacuum pump
  • analyzer
  • die bonder
  • Binding machine
  • spectrometer
  • Automated equipment
  • communication system
  • Environmental climate control

III. Product Performance Indicators

1.Operating Condition:

  • Working temperature: 0 ° C to 50 ° C
  • Storage temperature: -20 ° C to 70C
  • The sensor has an impact resistance of up to 100g
  • Humidity: 0~100% RH (without condensation)


2.Performance:





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Contact: James

Phone: +86-15684187478

Tel: +86-15684187478

Email: james.shi@teleclear.cn

Add: Room 1116, Yeda Zhigu Building A, No. 300 Changjiang Road, Yantai ETDZ, Shandong, China

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