TCM5200 series Micro Flow Gas Flow Sensor MFM - 副本

I. Product Features

The new generation TCM5200 series gas mass flow sensor adopts a new generation of microelectromechanical system (MEMS) flow sensing chip, which is smaller in size, has added display function, bidirectional measurement, RS485 output, NP&PNP output and other functions on the original basis; The flow rate has been expanded to 200L/MIN, with more flexible air interface and higher stability and reliability.

TCM5200 is based on independently developed MEMS flow sensing units and high-precision digital processing circuits. The integrated Δ - ∑ A/D converter and logic circuit with internal calibration function jointly ensure real-time and effective acquisition of sensing signals, obtaining accurate flow signals. Corresponding compensation algorithms are processed internally, so there is no need to perform any external calibration compensation to ensure high-precision flow output. A friendly digital output communication method allows users to easily obtain corresponding data information through communication;

• 1.High precision (2% F.S accuracy)
• 2.Linear output and no temperature compensation required
• 3.Maintain long-term stability with minimal zero drift
• 4.Anti clogging and pressure shock
• 5.Analog digital output is optional
• 6.Fast response time (10ms)
• 7.Wide flow range 0-200S LM

II. Application Fields

• photovoltaic equipment
• vacuum pump
• analyzer
• die bonder
• Binding machine
• spectrometer
• Automated equipment
• communication system
• Environmental climate control

III. Product Performance Indicators

1.Operating Condition:

• Working temperature: 0 ° C to 50 ° C
• Storage temperature: -20 ° C to 70C
• The sensor has an impact resistance of up to 100g
• Humidity: 0~100% RH (without condensation)

2.Performance：